Drive High Power UVC-LED Wafer into Low-Cost 4-Inch Era: Effect of Strain Modulation

Ultraviolet-C light-emitting diodes (UVC-LEDs) have great application in pathogen inactivation under various kinds of situations, especially in the fight against COVID-19. Unfortunately, its epitaxial wafers are so far limited to a size of 2 inches, which greatly increases the cost of massive production. In this work, a 4-inch crack-free high-power UVC-LED wafer is reported. This achievement relies on a proposed strain-tailored strategy, where a 3D to 2D (3D-2D) transition layer is introduced during the homo-epitaxy of AlN on the high temperature annealed (HTA)-AlN template, which successfully drives the original compressive strain into a tensile one and thus solves the challenge of realizing a high-quality Al0.6Ga0.4N layer with a flat surface. This smooth Al0.6Ga0.4N layer is nearly pseudomorphically grown on the strain-tailored HTA-AlN template, leading to 4-inch UVC-LED wafers with outstanding performances. The strategy succeeds in compromising the bottlenecked contradictory in producing a large-sized UVC-LED wafer on pronounced crystalline AlN template: The compressive strain in HTA-AlN allows for a crack-free 4-inch wafer, but at the same time leads to a deterioration of the AlGaN morphology and crystal quality. The launch of 4-inch wafers makes the chip fabrication process of UVC-LEDs match the mature blue one, and will definitely speed up the universal application of UVC-LED in daily life.

[Evaluation of safety of two inactivated COVID-19 vaccines in a large-scale emergency use].

Objective: To evaluate the safety of two inactivated COVID-19 vaccines in a large-scale emergency use. Methods: Based on the "Vaccination Information Collection System", the incidence data of adverse reactions in the population vaccinated with the inactivated COVID-19 vaccines developed by Beijing Institute of Biological Products Co., Ltd and Wuhan Institute of Biological Products Co., Ltd, respectively, in emergency use were collected, and the relevant information were analyzed with descriptive epidemiological and statistical methods. Results: By December 1, 2020, the vaccination information of 519 543 individuals had been collected. The overall incidence rate of adverse reactions was 1.06%, the incidence rate of systemic adverse reactions was 0.69% and the incidence rate of local adverse reactions was 0.37%. The main systemic adverse reactions included fatigue, headache, fever, cough and loss of appetite with the incidence rates of 0.21%, 0.14%, 0.06%, 0.05% and 0.05%, respectively; the main local adverse reactions were injection site pain and injection site swelling with the incidence rates of 0.24% and 0.05%, respectively. Conclusion: The two inactivated COVID-19 vaccines by Beijing Institute of Biological Products Co., Ltd and Wuhan Institute of Biological Products Co., Ltd showed that in the large-scale emergency use, the incidence rate of general reactions was low and no serious adverse reactions were observed after the vaccinations, demonstrating that the vaccines have good safety.